The IXION 193 SLM is a single frequency all-solid-state laser system for applications such as optical metrology, calibration of 193 nm stepper optics or bandwidth control of high power ArF excimer lasers. The spectral bandwidth is near its theoretical Fourier limit. The center wavelength of the system is customizable in a range between 185 and 194 nm and can be configured for a fixed wavelength at the time of order.

As an additional option, a high precision spectrometer with an absolute spectral accuracy of 0.001 nm can be integrated into the system. This enables maximum precision for the control of the spectral tuning of the laser.


IXION 193 Front View

IXION 193 SLM Specifications

Wavelength 193.368 nm
Average power 10 mW
Pulse duration typ 8-12 ns
Energy per pulse 1.6 µJ
Repetition rate 1-15 kHz
Beam quality M² < 1.6
Spectral bandwidth < 80 MHz
Spectral tunability > 10 pm
Coherence length > 2 m
Pulse to pulse stab. σ < 2.5 %


193 nm metrology
Spectrometer calibration
Injection seeding of Excimer lasers


Graphical user interface
Center wavelength: betw 185-194nm
LabVIEW libraries
Precision spectroscopy
CDRH compliance shutter

Typical Performance 

IXION 193 Typical Performance

IXION 193 Laser Head Dimension

IXION 193 Laser Head Dimension

System Dimensions (L x W x H) and Weight

IXION 193 System Dimensions and Weight

Electrical Characteristics

IXION 193 System Electrical Characteristics