The EXCITE is a single frequency all-solid-state laser system for applications in the UV such as wafer inspection, calibration of spectrometers and interferometric applications. The spectral bandwidth of less than 30 MHz is near its theoretical Fourier limit.
The laser provides short temporal pulses in a diffraction-limited beam with M² < 1.6 at repetition rates between 1 and 30 kHz. The average output power is more than 150 mW at 266 nm, or 500 mW at 355 nm, with ultra-stable pulse traces and a long coherence length of more than 4 m in a rugged industrial design.
Applications EXCITE Series
|Direct interferometric lithography|
|Graphical user interface|
|CDRH compliance shutter|